Thin-film deposition by combining plasma jet with spark discharge source at atmospheric pressure

Авторы

• Ussenov, Y.A.
• Toktamyssova, M.T.
• Dosbolayev, M.K.
• Gabdullin, M.T.
• Daniyarov, T.T.
• Ramazanov, T.S.

Области знаний