Electron Irradiation-Induced Degradation of TiN Thin Films on Quartz and Sapphire Substrates

Авторы

• Akhtanova, G.
• Yerlanuly, Y.
• Parkhomenko, H.P.
• Solovan, M.V.
• Mostovyi, A.I.
• Nurmukhanbetova, A.K.
• Kireyev, A.V.
• Danko, I.V.
• Oreshkin, P.A.
• Zholdybayev, T.K.
• Janseitov, D.M.
• Ramazanov, T.S.
• Brus, V.V.

Области знаний