On the in-situ determination of the effective secondary electron emission coefficient in low pressure capacitively coupled radio frequency discharges based on the electrical asymmetry effect

Авторы

• Masheyeva, R.
• Hartmann, P.
• Luo, L.-Y.
• Dzhumagulova, K.
• Liu, Y.-X.
• Schulze, J.
• Donkó, Z.

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