DETERMINATION OF RESIST CONTRAST IN ELECTRON BEAM LITHOGRAPHY UNDER DEPTH-DEPENDENT NONUNIFORM ENERGY DEPOSITION

Authors

• Muratov, M.M.
• Zaitsev, S.I.
• Pshikov, M.I.
• Guseinov, N.R.
• Nemkayeva, R.R.
• Mukhametkarimov, Y.S.
• Tolepov, Z.K.
• Akhmetsadyk, D.S.

Fields of knowledge