Effect of transition metals co-dopant on eliminating boron and phosphorous impurities from silicon

Authors

• Boukhvalov, D.W.
• Abdullin, K.A.
• Turmagambetov, T.S.
• Shongalova, A.К.
• Nevmerzhitskiy, I.S.
• Serikkanov, A.S.

Fields of knowledge