Публикации автора
Muratov, M.
Всего публикаций
8
Лет активности
4
Типов публикаций
1
2025 (4)
- DETERMINATION OF RESIST CONTRAST IN ELECTRON BEAM LITHOGRAPHY UNDER DEPTH-DEPENDENT NONUNIFORM ENERGY DEPOSITION
- Influence of Ion Core on Structural and Thermodynamic Properties of Dense Plasma
- Sensitivity and Contrast Characterization of PMMA 950K Resist Under 30 keV Focused Ga+ Ion Beam Exposure
- EFFECT OF IONIC CORE ON THE PROPERTIES OF NON-ISOTHERMAL PLASMAS