Experimental and numerical study of the ionization-attachment instability in an O2 capacitively coupled radio frequency plasma

Авторы

• Masheyeva, R.
• Vass, M.
• Myrzaly, M.
• Tian, C.-B.
• Dzhumagulova, K.
• Schulze, J.
• Donkó, Z.
• Hartmann, P.

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