Experimental and numerical study of the ionization-attachment instability in an O2 capacitively coupled radio frequency plasma

Авторлар

• Masheyeva, R.
• Vass, M.
• Myrzaly, M.
• Tian, C.-B.
• Dzhumagulova, K.
• Schulze, J.
• Donkó, Z.
• Hartmann, P.

Білім салалары