The performance of LaAlOx gate dielectric films prepared by… — ҚазҰУ

The performance of LaAlOx gate dielectric films prepared by sol-gel method at different temperatures of annealing

2026 · Article

Жариялану жылы

2026

Дереккөз: Journal of Sol-Gel Science and Technology

DOI: 10.1007/s10971-025-07039-2

Scopus: Жазбаны Scopus-та ашу

Білім салалары

General Chemistry Biomaterials Ceramics and Composites Electronic, Optical and Magnetic Materials Materials Chemistry Condensed Matter Physics