NANOPARTICLE SYNTHESIS BY THE PECVD METHOD BASED ON RF DISC… — KazNU

NANOPARTICLE SYNTHESIS BY THE PECVD METHOD BASED ON RF DISCHARGE

2023 · Article
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Publication year

2023

Authors

Source: Herald of the Kazakh British Technical UNiversity

DOI: 10.55452/1998-6688-2023-20-2-6-12

Scopus: Open in Scopus

Fields of knowledge

Multidisciplinary