Study of the influence of palladium nanoparticles on the st… — ҚазҰУ

Study of the influence of palladium nanoparticles on the structure of DLC films synthesized on silicon (100) substrates

2022 · Article

Жариялану жылы

2022

Дереккөз: Diamond and Related Materials

DOI: 10.1016/j.diamond.2022.109125

Scopus: Жазбаны Scopus-та ашу

Білім салалары

General Chemistry Electrical and Electronic Engineering Mechanical Engineering Electronic, Optical and Magnetic Materials Materials Chemistry